Gallium Arsenide Based Micro-Accelerometers - Circuits and Systems, 1997. Proceedings of the 40th Midwest Symposium on
نویسندگان
چکیده
Gallium arsenide (GaAs) based microaccelerometers are being developed for guidance and navigation subsystems, and various microsensor systems. The microaccelerometer is a microelectromechanical system (MEMS) micromachined on top of GaAs substrate or GaAs integrated cirwits. The MEMS accelerometer is integrated on the same chip as the GaAs readout circuit and the GaAs analog to digital converter. Test and prototype chips are developed.
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High Slew Rate Micro-Power CMOS OTA with Class AB Input stage - Circuits and Systems, 1997. Proceedings of the 40th Midwest Symposium on
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